GENEVA, Feb. 23 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2025/073061) for "LINE ASSEMBLY FOR AN INSTALLATION FOR SEMICONDUCTOR TECHNOLOGY, INSTALLATION FOR SEMICONDUCTOR TECHNOLOGY, AND METHOD FOR SETTING A PRESSURE IN THE LINE ASSEMBLY" on Aug 12, 2025. With publication no. WO/2026/037803, the details related to the patent application was published on Feb 19, 2026.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): SCHULZE, Daniel (Rudolf-Eber-Strasse 273447 Oberkochen), KIRSCH, Valeri (Rudolf-Eber-Strasse 273447 Oberkochen), KLASNA, Michael (R...