INTERNATIONAL PATENT: CARL ZEISS SMT GMBH FILES APPLICATION FOR "INSERT FOR A CHAMBER WALL OF A SOURCE CHAMBER OF AN EUV RADIATION SOURCE"

GENEVA, Nov. 3 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2025/061246) for "INSERT FOR A CHAMBER WALL OF A SOURCE CHAMBER OF AN EUV RADIATION SOURCE" on Apr 24, 2025. With publication no. WO/2025/224256, the details related to the patent application was published on Oct 30, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): IRNSTETTER, Johann (Rudolf-Eber-Strasse 273447 Oberkochen)

Abstract: An insert (8) for a chamber wall of a source chamber (2) of an EUV radiation source (1) comprises a contact portion (31) of a contact surface, against ...