INTERNATIONAL PATENT: CARL ZEISS SMT GMBH FILES APPLICATION FOR "IMAGING OPTICAL UNIT FOR IMAGING AN OBJECT FIELD INTO AN IMAGE FIELD AND PROJECTION EXPOSURE APPARATUS HAVING SUCH AN IMAGING OPTICAL UNIT"

GENEVA, June 4 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2024/082315) for "IMAGING OPTICAL UNIT FOR IMAGING AN OBJECT FIELD INTO AN IMAGE FIELD, AND PROJECTION EXPOSURE APPARATUS HAVING SUCH AN IMAGING OPTICAL UNIT" on Nov 14, 2024. With publication no. WO/2025/108821, the details related to the patent application was published on May 30, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): HOFMAIER, Andreas (Rudolf-Eber-Strasse 273447 Oberkochen), MUELLER, Tanja (Rudolf-Eber-Strasse 273447 Oberkochen), HAEGELE, Jessica (Rudolf-Eber-Strasse 2...