GENEVA, March 2 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2025/073109) for "IMAGING EUV OPTICAL UNIT" on Aug 12, 2025. With publication no. WO/2026/041499, the details related to the patent application was published on Feb 26, 2026.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): BEDER, Susanne (Rudolf-Eber-Strasse 273447 Oberkochen)
Abstract: An imaging EUV optical unit (10) has a plurality of mirrors (M1 to M6) for guiding imaging light (16) along an imaging beam path from an object field (5) to an image field (11). The imaging optical unit...