GENEVA, May 3 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2024/079980) for "APPARATUS AND METHOD FOR CHECKING A COMPONENT, AND LITHOGRAPHY SYSTEM" on Oct 23, 2024. With publication no. WO/2026/087041, the details related to the patent application was published on Apr 30, 2026.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): MUELLER, Jonathan (Rudolf-Eber-Strasse 273447 Oberkochen), PATRA, Michael (Rudolf-Eber-Strasse 273447 Oberkochen), CARL, Michael (Rudolf-Eber-Strasse 273447 Oberkochen), GRUNER, Toralf (Rudolf-Eber-Strasse 273447 Oberkochen),...