GENEVA, Jan. 27 -- CARL ZEISS SMS LTD. (HaDolev 3 (PO Box 32)Bar Lev Industrial Park2015600 MISGAV) filed a patent application (PCT/IL2024/050689) for "EXTREME ULTRAVIOLET MASK INSPECTION - LASER INTERFEROMETER OPTICAL ALIGNMENT" on Jul 14, 2024. With publication no. WO/2026/018233, the details related to the patent application was published on Jan 22, 2026.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): NAIM, Ronen (3, Dolev2015600 Misgav)
Abstract: A method for interferometer alignment in an apparatus for sample inspection with an inspection means and a sample stage, wherein at least a portion...