INTERNATIONAL PATENT: BROOKS AUTOMATION US, LLC FILES APPLICATION FOR "VISION BASED POSITION FEEDBACK FOR SUBSTRATE HANDLERS"

GENEVA, March 11 -- BROOKS AUTOMATION US, LLC (15 Elizabeth DriveChelmsford, MA 01824) filed a patent application (PCT/US2025/043711) for "VISION BASED POSITION FEEDBACK FOR SUBSTRATE HANDLERS" on Aug 27, 2025. With publication no. WO/2026/050361, the details related to the patent application was published on Mar 05, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): MOURA, Jairo T. (93 Brigham StreetMarlborough, MA 01752), TSANG, Vincent W. (31 Hillside RoadLincoln, MA 01773), HIREGOUDAR, Amam (15 Elizabeth DriveChelmsford, MA 01824)

Abstract: A substrate processing apparatus having a substra...