INTERNATIONAL PATENT: BROOKS AUTOMATION (GERMANY) GMBH FILES APPLICATION FOR "METHOD AND DEVICE FOR CLEANING SEMICONDUCTOR DEVICES AND CARRIERS FOR SEMICONDUCTOR DEVICES"

GENEVA, May 18 -- BROOKS AUTOMATION (GERMANY) GMBH (Daimlerstrasse 778256 SteiBlingen) filed a patent application (PCT/EP2025/082182) for "METHOD AND DEVICE FOR CLEANING SEMICONDUCTOR DEVICES AND CARRIERS FOR SEMICONDUCTOR DEVICES" on Nov 06, 2025. With publication no. WO/2026/099380, the details related to the patent application was published on May 15, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): BAUMEISTER, Cornelia (LohrstraBe 1478647 Trossingen), GHASEMIANSAFAEI, Mandana (Worblinger StraBe 1878224 Singen), SCHERER, Alexander (Leutenweg 1578239 Rielasingen-Worblingen), BECK, Daniel (W...