INTERNATIONAL PATENT: BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD., MATTSON TECHNOLOGY, INC. FILES APPLICATION FOR "PLASMA PROCESSING APPARATUS"

GENEVA, March 19 -- BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD. (No.9 RuiHe West Er RoadBeijing Economic Technological Development AreaBeijing, Beijing 100176), MATTSON TECHNOLOGY, INC. (47131 BAYSIDE PARKWAYFREMONT, California 94538) filed a patent application (PCT/US2025/045541) for "PLASMA PROCESSING APPARATUS" on Sep 09, 2025. With publication no. WO/2026/055675, the details related to the patent application was published on Mar 12, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): ZHENG, Jianpin (c/o Mattson Technology, Inc.47131 Bayside ParkwayFremont, California 94538), KODUMURI, ...