INTERNATIONAL PATENT: BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD., MATTSON TECHNOLOGY, INC., ZHANG, QI FILES APPLICATION FOR "METHODS AND SYSTEMS FOR COATED COMPONENTS OF A PLASMA PROCESSING SYSTEM"

GENEVA, Feb. 11 -- BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD. (No.9, RuiHe West Er RoadBeijing Economic Technological Development AreaBeijing 100176), MATTSON TECHNOLOGY, INC. (47131 Bayside ParkwayFremont, California 94538), ZHANG, Qi (c/o Mattson Technology, Inc.47131 Bayside ParkwayFremont, California 94538) filed a patent application (PCT/US2025/039621) for "METHODS AND SYSTEMS FOR COATED COMPONENTS OF A PLASMA PROCESSING SYSTEM" on Jul 29, 2025. With publication no. WO/2026/030290, the details related to the patent application was published on Feb 05, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (W...