INTERNATIONAL PATENT: AXCELIS TECHNOLOGIES, INC. FILES APPLICATION FOR "RF RESONATOR WITH HIGH Q VALUE FOR ION BEAM ACCLELERATION"

GENEVA, Feb. 4 -- AXCELIS TECHNOLOGIES, INC. (108 Cherry Hill DriveBeverly, Massachusetts 01915) filed a patent application (PCT/US2025/038760) for "RF RESONATOR WITH HIGH Q VALUE FOR ION BEAM ACCLELERATION" on Jul 22, 2025. With publication no. WO/2026/024788, the details related to the patent application was published on Jan 29, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): PLATOW, Wilhelm (17 Plummer AvenueNewburyport, Massachusetts 01950), SATOH, Shu (11 Larkin RoadByfield, Massachusetts 01922), MAYFIELD, Patrick (30 Parkside Pl. #416Malden, Massachusetts 02148), NAKATSUGAWA, Tomoya (4...