INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "SYSTEMS AND METHODS FOR REFURBISHING AND QUALIFYING A MATERIAL RECEPTACLE FOR AN EUV RADIATION SOURCE"

GENEVA, March 17 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/073801) for "SYSTEMS AND METHODS FOR REFURBISHING AND QUALIFYING A MATERIAL RECEPTACLE FOR AN EUV RADIATION SOURCE" on Aug 20, 2025. With publication no. WO/2026/052393, the details related to the patent application was published on Mar 12, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): KANG, Min (P.O. Box 3245500 AH Veldhoven), BOVERS, Bart, Cornelis, Antonius (P.O. Box 3245500 AH Veldhoven)

Abstract: An apparatus for refurbishing a material receptacle having process material s...