INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "SYSTEMS AND METHODS FOR DESIGN OF A METROLOGY TARGET"

GENEVA, Jan. 5 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/065560) for "SYSTEMS AND METHODS FOR DESIGN OF A METROLOGY TARGET" on Jun 04, 2025. With publication no. WO/2026/002576, the details related to the patent application was published on Jan 02, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): HARUTYUNYAN, Davit (80 W Tasman Dr.San Jose, California 95134), HU, Xiang (P.O. Box 3245500 AH Veldhoven), VAN DER SCHAAR, Maurits (P.O. Box 3245500 AH Veldhoven), REN, Liping (80 W Tasman Dr.San Jose, California 95134)

Abstract: Improved systems...