GENEVA, May 18 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/077515) for "SYSTEM AND METHOD" on Sep 25, 2025. With publication no. WO/2026/098842, the details related to the patent application was published on May 15, 2026.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): SMEETS, Benjamin, Cunnegonda, Henricus (P.O. Box 3245500 AH Veldhoven), HUANG, Yang-Shan (P.O. Box 3245500 AH Veldhoven)
Abstract: The present invention concerns a system, comprising a stage for supporting a substrate and a control system for controlling movement of the stage. The...