INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "SUBSTRATE SUPPORT, METHOD FOR LOADING A SUBSTRATE ON A SUBSTRATE SUPPORT AND LITHOGRAPHIC APPARATUS"

GENEVA, Jan. 26 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/068581) for "SUBSTRATE SUPPORT, METHOD FOR LOADING A SUBSTRATE ON A SUBSTRATE SUPPORT AND LITHOGRAPHIC APPARATUS" on Jul 01, 2025. With publication no. WO/2026/017397, the details related to the patent application was published on Jan 22, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): EGGELS, Eva, Hanna (P.O. Box 3245500 AH Veldhoven), BERGHOUT, Pieter (P.O. Box 3245500 AH Veldhoven), HARBERTS, Dirk, Willem (P.O. Box 3245500 AH Veldhoven)

Abstract: The present invention provides ...