INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "SUBSTRATE STORAGE SYSTEM, SUBSTRATE HANDLING APPARATUS, METHOD OF TEMPORARILY STORING A SUBSTRATE"

GENEVA, Jan. 5 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/063333) for "SUBSTRATE STORAGE SYSTEM, SUBSTRATE HANDLING APPARATUS, METHOD OF TEMPORARILY STORING A SUBSTRATE" on May 15, 2025. With publication no. WO/2026/002464, the details related to the patent application was published on Jan 02, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): BRULS, Richard, Joseph (P.O. Box 3245500 AH Veldhoven)

Abstract: The invention relates to a substrate storage system comprising an enclosure, a substrate loading port to load a substrate into and/or un...