INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "SILENCER FOR THERMAL CONDITIONING SYSTEM AND METHOD FOR FILLING THEREOF, THERMAL CONDITIONING METHOD AND LITHOGRAPHIC APPARATUS"

GENEVA, March 2 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/070860) for "SILENCER FOR THERMAL CONDITIONING SYSTEM AND METHOD FOR FILLING THEREOF, THERMAL CONDITIONING METHOD, AND LITHOGRAPHIC APPARATUS" on Jul 21, 2025. With publication no. WO/2026/041325, the details related to the patent application was published on Feb 26, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): REZAEIHA, Abdolrahim (P.O. Box 3245500 AH Veldhoven), FEIJTS, Maurice, Wilhelmus, Leonardus, Hendricus (P.O. Box 3245500 AH Veldhoven), BALARAJ, Vignesh, Srinivasan (P.O....