GENEVA, April 18 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/077217) for "SENSOR SYSTEM" on Sep 23, 2025. With publication no. WO/2026/077714, the details related to the patent application was published on Apr 16, 2026.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): WARNAAR, Patrick (P.O. Box 3245500 AH Veldhoven), GOORDEN, Sebastianus, Adrianus (P.O. Box 3245500 AH Veldhoven)
Abstract: A sensor system for measuring the height of a substrate surface, the sensor system comprising: a projection system comprising a radiation source configured to e...