INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "SENSOR HEAD, METROLOGY SYSTEM AND LITHOGRAPHIC APPARATUS"

GENEVA, April 18 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/076406) for "SENSOR HEAD, METROLOGY SYSTEM AND LITHOGRAPHIC APPARATUS" on Sep 16, 2025. With publication no. WO/2026/077660, the details related to the patent application was published on Apr 16, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): BEUKMAN, Arjan, Johannes, Anton (P.O. Box 3245500 AH Veldhoven), VAN ENGELEN, Jorn, Paul (P.O. Box 3245500 AH Veldhoven)

Abstract: Disclosed is a photonic integrated circuit metrology sensor head comprising a radiation splitter, a plurality...