INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "ROBOTIC ARM FOR CLEANING STRUCTURE SURFACE IN CHAMBER"

GENEVA, June 10 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/079238) for "ROBOTIC ARM FOR CLEANING STRUCTURE SURFACE IN CHAMBER" on Oct 16, 2024. With publication no. WO/2025/113880, the details related to the patent application was published on Jun 05, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): MITRA, Pitam (17075 Thornmint CourtSan Diego, California 92127), WICK, John, Charles, Hirschy (17075 Thornmint CourtSan Diego, California 92127)

Abstract: An apparatus for cleaning a surface of a component within an extreme ultraviolet (EUV) ...