INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "PROCESS INDEPENDENT INTEGRATED OPTICS FOR WAFER ALIGNMENT SENSORS"

GENEVA, March 9 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/072166) for "PROCESS INDEPENDENT INTEGRATED OPTICS FOR WAFER ALIGNMENT SENSORS" on Jul 31, 2025. With publication no. WO/2026/046645, the details related to the patent application was published on Mar 05, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): JAHANI, Saman (77 Danbury RoadWilton, Connecticut 06897)

Abstract: A system is disclosed for determining a focus or tilt of a target in an alignment sensor. The system includes two optical sensors, each having design features that c...