INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "MULTIWAVELENGTH MICRO-OPTICAL PATTERNING PROCESS METROLOGY SYSTEMS AND METHODS"

GENEVA, Nov. 3 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/058770) for "MULTIWAVELENGTH MICRO-OPTICAL PATTERNING PROCESS METROLOGY SYSTEMS AND METHODS" on Mar 31, 2025. With publication no. WO/2025/223792, the details related to the patent application was published on Oct 30, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): SETIJA, Irwan, Dani (P.O. Box 3245500 AH Veldhoven), AKBULUT, Duygu (P.O. Box 3245500 AH Veldhoven), SAHIN, Ezgi (P.O. Box 3245500 AH Veldhoven), VAN ENGELEN, Jorn, Paul (P.O. Box 3245500 AH Veldhoven), VAN T WESTEINDE, M...