GENEVA, Sept. 16 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/053627) for "METROLOGY TOOL AND COMPONENTS THEREFOR" on Feb 12, 2025. With publication no. WO/2025/185943, the details related to the patent application was published on Sep 11, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): MATHIJSSEN, Simon, Gijsbert, Josephus (P.O Box 3245500 AH Veldhoven), VARGHESE, Smitha, Susan (06897 CTWilton, Connecticut)
Abstract:
A metrology tool for determining one or more parameters of interest (e.g. overlay) of a structure on an object (e.g. a waf...