GENEVA, March 30 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/074077) for "METROLOGY TOOL" on Aug 23, 2025. With publication no. WO/2026/061729, the details related to the patent application was published on Mar 26, 2026.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): BUIJS, Robin, Daniel (P.O. Box 3245500 AH Veldhoven), VAN T WESTEINDE, Maaike (P.O. Box 3245500 AH Veldhoven), VAN ENGELEN, Jorn, Paul (P.O. Box 3245500 AH Veldhoven)
Abstract: An optical metrology system for measuring a periodic target. The system comprises first and second emissi...