GENEVA, June 16 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/082165) for "METROLOGY APPARATUS AND ASSOCIATED METHODS" on Nov 13, 2024. With publication no. WO/2025/119609, the details related to the patent application was published on Jun 12, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): CUNBUL, Ahmet, Burak (P.O. Box 3245500 AH Veldhoven), TUKKER, Teunis, Willem (P.O. Box 3245500 AH Veldhoven), GOORDEN, Sebastianus, Adrianus (P.O. Box 3245500 AH Veldhoven)
Abstract:
Metrology apparatus comprises: an illumination module; and an interfer...