GENEVA, April 13 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/075245) for "METHODS AND SYSTEMS FOR DETERMINING RETICLE DEFORMATION" on Sep 04, 2025. With publication no. WO/2026/073658, the details related to the patent application was published on Apr 09, 2026.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): HAJIAHMADI, Mohammadreza (P.O. Box 3245500 AH Veldhoven), HAUPTMANN, Marc (P.O. Box 3245500 AH Veldhoven), VAN GOCH, Bram, Paul, Theodoor (P.O. Box 3245500 AH Veldhoven), HAMANS, Ruben, Floris (P.O. Box 3245500 AH Veldhoven), TSAO, Yuchia (77...