INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "METHOD OF PERFORMING A QUALIFICATION ACTION ON AN EXPOSURE APPARATUS"

GENEVA, Jan. 5 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/064031) for "METHOD OF PERFORMING A QUALIFICATION ACTION ON AN EXPOSURE APPARATUS" on May 21, 2025. With publication no. WO/2026/002488, the details related to the patent application was published on Jan 02, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): NEEFS, Patricius, Jacobus (P.O. Box 3245500 AH Veldhoven), CHAUMY, Guillaume, Roland (P.O. Box 3245500 AH Veldhoven), NGO, Ngoc, Tuan (P.O. Box 3245500 AH Veldhoven), VAN DE VEN, Franciscus, Cornelis (P.O. Box 3245500 AH Veldhoven)...