INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "METHOD OF DETERMINING A PARAMETER ASSOCIATED WITH A FLUID HANDLING STRUCTURE AND/OR WETTABILITY OF A SUBSTRATE IN IMMERSION LITHOGRAPHY AND LITHOGRAPHIC APPARATUS CONFIGURED TO PERFORM THE METHOD"

GENEVA, April 18 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/075400) for "METHOD OF DETERMINING A PARAMETER ASSOCIATED WITH A FLUID HANDLING STRUCTURE AND/OR WETTABILITY OF A SUBSTRATE IN IMMERSION LITHOGRAPHY AND LITHOGRAPHIC APPARATUS CONFIGURED TO PERFORM THE METHOD" on Sep 08, 2025. With publication no. WO/2026/077619, the details related to the patent application was published on Apr 16, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): BERENDSEN, Christianus, Wilhelmus, Johannes (P.O. Box 3245500 AH Veldhoven), EUMMELEN, Erik, Henricus,...