INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "METHOD AND SYSTEM FOR PATTERN COVERAGE DETERMINATION AND PATTERN SELECTION USING DIFFUSION MODEL"

GENEVA, March 16 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/072552) for "METHOD AND SYSTEM FOR PATTERN COVERAGE DETERMINATION AND PATTERN SELECTION USING DIFFUSION MODEL" on Aug 05, 2025. With publication no. WO/2026/052311, the details related to the patent application was published on Mar 12, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): LUO, Ya (80 W Tasman DriveSan Jose, California 95134), LU, Yen-Wen (80 W Tasman DriveSan Jose, California 95134), HOWELL, Rafael C. (80 W Tasman DriveSan Jose, California 95134)

Abstract: Described he...