GENEVA, Dec. 29 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/063514) for "METHOD, DEVICE AND SYSTEM FOR SENSOR SURFACE CLEANING" on May 16, 2025. With publication no. WO/2025/261682, the details related to the patent application was published on Dec 26, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): BANERJEE, Nirupam (P.O. Box 3245500 AH Veldhoven), HERMENS, Jacobus, Cornelis, Josephus (P.O. Box 3245500 AH Veldhoven), MOMMERS, Stefan Jean Paul (P.O. Box 3245500 AH Veldhoven), ROPS, Cornelius, Maria (P.O. Box 3245500 AH Veldhoven)

Abstract:...