INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "METHOD, COMPUTER PROGRAM AND ASSEMBLY FOR PELLICLE MONITORING"

GENEVA, Jan. 26 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/066679) for "METHOD, COMPUTER PROGRAM AND ASSEMBLY FOR PELLICLE MONITORING" on Jun 16, 2025. With publication no. WO/2026/017337, the details related to the patent application was published on Jan 22, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): PAARHUIS, Bart, Dinand (P.O. Box 3245500 AH Veldhoven), REIJNDERS, Marinus, Petrus (P.O. Box 3245500 AH Veldhoven), DREISSEN, Mante (P.O. Box 3245500 AH Veldhoven), TE SLIGTE, Edwin (P.O. Box 3245500 AH Veldhoven)

Abstract: A method of ...