GENEVA, March 23 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/073072) for "MEASUREMENT SYSTEM AND METHOD OF USE" on Aug 12, 2025. With publication no. WO/2026/057272, the details related to the patent application was published on Mar 19, 2026.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): GALLAGHER, Joseph, Peter (P.O. Box 3245500 AH Veldhoven)
Abstract: Illuminating a patterning device with radiation, the patterning device comprising a first patterned region arranged to receive at least a portion of the radiation and to form a plurality of fir...