INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "ASTIGMATISM MANIPULATION FOR CHARGED-PARTICLE BEAM TOOL"

GENEVA, April 28 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/079971) for "ASTIGMATISM MANIPULATION FOR CHARGED-PARTICLE BEAM TOOL" on Oct 16, 2025. With publication no. WO/2026/082903, the details related to the patent application was published on Apr 23, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): IMPONENTE, Giovanni (P.O. Box 3245500 AH Veldhoven), REN, Yan (P.O. Box 3245500 AH Veldhoven)

Abstract: A method comprises scanning one or more features on a sample using a charged-particle beam having a first beam profile to obtain a first ...