INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "AN ELECTROSTATIC WAFER CLAMP AND A METHOD OF UNLOADING A WAFER THEREFROM"

GENEVA, April 27 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/079037) for "AN ELECTROSTATIC WAFER CLAMP AND A METHOD OF UNLOADING A WAFER THEREFROM" on Oct 08, 2025. With publication no. WO/2026/082527, the details related to the patent application was published on Apr 23, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): JANSEN, Maarten, Mathijs, Marinus (P.O. Box 3245500 AH Veldhoven), LI, Jun (P.O. Box 3245500 AH Veldhoven), REIJNEN, Martinus, Cornelis (P.O. Box 3245500 AH Veldhoven), VAN DE VEN, Tijn, Henricus, Maria (P.O. Box 3245500 AH V...