INTERNATIONAL PATENT: ASML NETHERLANDS B.V., CARL ZEISS SMT GMBH FILES APPLICATION FOR "AN EXTREME ULTRAVIOLET MIRROR WITH AN INTEGRATED SENSOR"

GENEVA, Dec. 22 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven), CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2025/062190) for "AN EXTREME ULTRAVIOLET MIRROR WITH AN INTEGRATED SENSOR" on May 05, 2025. With publication no. WO/2025/256814, the details related to the patent application was published on Dec 18, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): VAN SLUISVELD, Wouterus, Jozephus, Johannes (P.O. Box 3245500 AH Veldhoven), HARTGERS, Albertus (P.O. Box 3245500 AH Veldhoven), STEEGHS, Marco, Matheus, Louis (P.O. Box 3245500 AH V...