INTERNATIONAL PATENT: APPLIED MATERIALS, INC. FILES APPLICATION FOR "SULFUR BASED RESIST HARDENING"

GENEVA, March 31 -- APPLIED MATERIALS, INC. (3050 Bowers AvenueSanta Clara, CA 95054) filed a patent application (PCT/US2025/046189) for "SULFUR BASED RESIST HARDENING" on Sep 12, 2025. With publication no. WO/2026/064217, the details related to the patent application was published on Mar 26, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): WOJTECKI, Rudy (1140 E. Arques AvenueSunnyvale, CA 94085), HUANG, Zhiyu (1140 E. Arques AvenueSunnyvale, CA 94085)

Abstract: Embodiments described herein relate to a method for transferring a pattern in a resist layer into a patterning stack under the res...