GENEVA, Sept. 10 -- APPLIED MATERIALS, INC. (3050 Bowers AvenueSanta Clara, California 95054) filed a patent application (PCT/US2025/016723) for "GAS INJECTOR ASSEMBLY WITH IMPROVED GAS MIXING" on Feb 21, 2025. With publication no. WO/2025/183984, the details related to the patent application was published on Sep 04, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): MUSTAFA, Muhannad (3050 Bowers AvenueSanta Clara, California 95054)
Abstract:
Gas inserts for semiconductor manufacturing processing chambers with a plurality of injection levels are described. Each of the gas injection levels p...