INTERNATIONAL PATENT: APPLIED MATERIALS, INC. FILES APPLICATION FOR "ELECTROSTATIC CHUCKS WITH SENSORS TO DETECT SUBSTRATE DEFORMATION"

GENEVA, March 11 -- APPLIED MATERIALS, INC. (3050 Bowers AvenueSanta Clara, California 95054) filed a patent application (PCT/US2025/044060) for "ELECTROSTATIC CHUCKS WITH SENSORS TO DETECT SUBSTRATE DEFORMATION" on Aug 28, 2025. With publication no. WO/2026/050571, the details related to the patent application was published on Mar 05, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): CHADHA, Arvinder Manmohan Singh (3050 Bowers AvenueSanta Clara, California 95054), SAEEDFAR, Amin (3050 Bowers AvenueSanta Clara, California 95054)

Abstract: A system includes an electrostatic chuck. The electro...