GENEVA, March 24 -- APPLIED MATERIALS, INC. (3050 Bowers AvenueSanta Clara, California 95054) filed a patent application (PCT/US2025/044945) for "CHUCKING OF HIGH-WARP SUBSTRATES USING MULTIZONAL CHUCKS" on Sep 04, 2025. With publication no. WO/2026/059802, the details related to the patent application was published on Mar 19, 2026.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): SUBRAHMANYAN, Pradeep Kumar (3050 Bowers AvenueSanta Clara, California 95054), LISCHER, D. Jeffrey (3050 Bowers AvenueSanta Clara, California 95054), LEE, Wonjae (3050 Bowers AvenueSanta Clara, California 95054)
Abstract...