GENEVA, Sept. 18 -- PICOSUN OY filed a patent application (FI2026/050093) for “APPARATUS AND METHOD FOR SUBSTRATE PROCESSING”. With publication no. WO/2026/185507, here are the other details related to the patent application:
Kind: Initial Publication with ISR [A1]
IPC: C23C 16/452
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Disclaimer: Curated by HT Syndication....