GENEVA, June 19 -- IUCF-HYU(INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY) filed a patent application (KR2025/018530) for “APPARATUS AND METHOD FOR INSPECTING SEMICONDUCTOR SUBSTRATE USING TERAHERTZ WAVE”. With publication no. WO/2026/106281, here are the other details related to the patent application:
Kind: Initial Publication with ISR [A1]
IPC: G01N 21/3586
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
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