GENEVA, June 24 -- ASML NETHERLANDS B.V. filed a patent application (EP2025/082905) for “A METHOD, DEVICE, CHARGED PARTICLE-OPTICAL APPARATUS AND AN ASSESSMENT APPARATUS”. With publication no. WO/2026/114652, here are the other details related to the patent application:
Kind: Initial Publication with ISR [A1]
IPC: H01J 37/153
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
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