Japan Intellectual Property Rights: WORK-PIECE PROCESSING DEVICE AND CONTROL METHOD OF THE SAME

Japan, Feb. 24 -- TOKYO SEIMITSU CO LTD has got intellectual property rights for 'WORK-PIECE PROCESSING DEVICE AND CONTROL METHOD OF THE SAME.' Other related details are as follows:

Application Number: JP,2024-096626

Category (FI): H10P58/00@F,H10P58/00@C,G01B11/24@D,H01L21/78@F,H01L21/78@C,B24B27/06@M,B24B49/04@Z,B24B49/12

Stage: PROBLEM TO BE SOLVED: To provide a work-piece processing device and a control method of the same in which measurement of processing quality of a part to be processed in a work-piece can be performed with a white-light interferometer for a short time.SOLUTION: A work-piece processing device comprises: a processing control part 78 which drives a processing head (blade 22A, 22B) and a relative movement mechanism 4...