Japan Intellectual Property Rights: WAFER RING POSITIONING STAGE

Japan, Feb. 24 -- SHENG CHUAN TECHNOLOGY CO LTD has got intellectual property rights for 'WAFER RING POSITIONING STAGE.' Other related details are as follows:

Application Number: JP,2025-018818

Category (FI): H10P72/70,H01L21/68@N

Stage: PROBLEM TO BE SOLVED: To provide a wafer ring positioning stage for preventing deformation of a wafer ring caused by an excessive clamping force for holding and fixing the wafer ring.SOLUTION: In a wafer ring positioning stage having a main body part 20 on which a wafer ring A is to be placed, the main body part includes: a first plane 21 set horizontally on the main body part; a first fixed abutment member 231 and a first movable abutment member 241, which are located at two opposing ends of the main bo...