Japan, Oct. 29 -- SUMITOMO ELECTRIC IND LTD has got intellectual property rights for 'WAFER HOLDING TABLE.' Other related details are as follows:
Application Number: JP,2021-207427
Category (FI): H01L21/68@N
Stage: Grant(IP right document published.)
Filing Date: Dec. 21, 2021
Publication Date: July 3, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....