Japan, Oct. 30 -- SUMITOMO ELECTRIC IND LTD has got intellectual property rights for 'WAFER HEATING DEVICE AND WAFER HEATING METHOD.' Other related details are as follows:

Application Number: JP,2025-005295

Category (FI): G01K1/14@L,H05B3/00,310@D,H01L21/31@B,H01L21/02@Z,G01K7/02@E

Stage: Grant (IP right document published.)

Filing Date: Jan. 15

Publication Date: April 17

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

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