Japan, Aug. 6 -- LAM RESEARCH CORPORATION has got intellectual property rights for 'WAFER HANDLING ROBOT WITH RADIAL GAS CURTAIN AND/OR INTERIOR VOLUME CONTROL.' Other related details are as follows:
Application Number: JP,2025-129815
Category (FI): H10P72/30@A,H01L21/68@A
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Aug. 4, 2025
Publication Date: Oct. 28, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....