Japan, Jan. 28 -- ASM IP HOLDING BV has got intellectual property rights for 'VERTICAL BATCH FURNACE ASSEMBLY.' Other related details are as follows:
Application Number: JP,2020-169047
Category (FI): H10P72/10@T,H10P32/00,201@J,B65G1/00,547@D,H10P72/30@A,H01L21/68@A,B65G49/07@F,H01L21/68@T,H01L21/22,511@J,B65G1/00,547@B
Stage: Grant (IP right document published.)
Filing Date: Oct. 6, 2020
Publication Date: April 22, 2021
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....