Japan, Nov. 10 -- LAM RESEARCH CORPORATION has got intellectual property rights for 'VAPOR DEPOSITION OF METAL FILM.' Other related details are as follows:
Application Number: JP,2022-141887
Category (FI): C23C16/08,C23C16/14,C23C16/34,C23C16/56,H01L21/285@C,H01L21/88@R,H10P14/43,H10W20/44@R
Stage: Grant (IP right document published.)
Filing Date: Sept. 7, 2022
Publication Date: Dec. 6, 2022
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....