Japan, June 10 -- ULVAC JAPAN LTD has got intellectual property rights for 'VACUUM PROCESSING APPARATUS AND VACUUM PROCESSING METHOD.' Other related details are as follows:
Application Number: JP,2022-065848
Category (FI): C23C14/35@D
Stage: Grant (IP right granted following substantive examination.)
Filing Date: April 12, 2022
Publication Date: Oct. 24, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....